Paper Title:
Study of Dry and Wet Oxide Etching for MOSFET-Based MEMS Devices
  Abstract

Withdrawn at author request

  Info
Periodical
Edited by
Lynn Khine and Julius M. Tsai
Pages
152-154
DOI
10.4028/www.scientific.net/AMR.254.152
Online since
May 2011
Export
Price
$32.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.