Paper Title:
Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes
  Abstract

A three-axis capacitive accelerometer based on SOI is presented. Acceleration is detected by both in-plane and vertical comb electrodes. Separating the three-axis sensing with different groups of comb electrodes enables direct detection for each axis with full differential capacitive sensing scheme. The capacitance sensitivities of X and Y accelerometer are 160.7 fF/g and Z accelerometer 21.6 fF/g.

  Info
Periodical
Edited by
Lynn Khine and Julius M. Tsai
Pages
203-206
DOI
10.4028/www.scientific.net/AMR.254.203
Citation
J. Xie, R. Agarwal, K. H. Lau, Y. H. Liu, M. L. J. Tsai, "Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes", Advanced Materials Research, Vol. 254, pp. 203-206, 2011
Online since
May 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Mei Liu, J. Zhu, Min Zhuo, Jing Wu, Shi Xing Jia
Abstract:We report our efforts towards designing and fabricating capacitive microaccelerometers with flat bottom surfaces free from the notching...
108
Authors: M.S. Khan, A. Iqbal, S.A. Bazaz, M. Abid
Chapter 22: Mechanical and Electronic Engineering Control
Abstract:In this paper, we present the design verification of PolyMUMPs based monolithic tri-axis MEMS capacitive accelerometer. The physical level...
4625
Authors: Shi Tao Wang, Yu Bin Jia, Bin Zhen Zhang, Xue Song Liu, Qin Wen Huang, Yi Long Hao
Chapter 1: Micro/Nano Transducer/Acutar/Robot
Abstract:In this paper, an integrated 3-axis MEMS accelerometer was analyzed. Because of asymmetrical structure, z-axis sensing element, which was...
163
Authors: Xing Hua Wang, Zhi Hua Chen, Ding Bang Xiao, Xue Zhong Wu
Chapter 1: Micro/Nano Transducer/Acutar/Robot
Abstract:Due to many inherently problems of accelerometers on market, such as complex fabrication process and low precision, a monolithic three-axis...
122
Authors: Hong Bo Ma, Bo Li, Yong Rui Zhao
Chapter 2: Sensors
Abstract:This paper presents an electromechanical coupled analysis for a single proof-mass one-axis capacitive accelerometer to supply a reference of...
149