Paper Title:
Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants
  Abstract

Pressure sensors using MEMS technology have been advanced due to their low cost, small size and high sensitivity, which is an advantage for biomedical applications. In this paper,silicon nanowire was proposed to be used as the piezoresistors due to the high sensitivity [1][2].The sensors were designed, and characterized for the use of medical devices for pressure monitoring. The pressure sensor size is 2mm x 2mm with embedded SiNWs of 90nm x150nm been fabricated. Additionally, the sensitivity of 0.0024 Pa-1 pressure sensor has been demonstrated.

  Info
Periodical
Edited by
Lynn Khine and Julius M. Tsai
Pages
94-98
DOI
10.4028/www.scientific.net/AMR.254.94
Citation
L. S. Lim, W. T. Park, L. Lou, H. H. Feng, P. Singh, "Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants", Advanced Materials Research, Vol. 254, pp. 94-98, 2011
Online since
May 2011
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