Adhesion Promoter and Anti-Sticking Layer Effects on Adhesion Properties Using Symmetric AFM Probe |
| Journal |
Advanced Materials Research (Volumes 26 - 28) |
| Volume |
Advanced Materials and Processing |
| Edited by |
Young Won Chang, Nack J. Kim and Chong Soo Lee |
| Pages |
1113-1116 |
| DOI |
10.4028/www.scientific.net/AMR.26-28.1113 |
| Online since |
October, 2007 |
| Authors |
Hee Jung Lee,
Seung Min Hyun,
Hak Joo Lee,
Dae Geun Choi,
Dong Il Lee,
Eung Sug Lee
|
| Keywords |
Adhesion Promoter, Anti-Sticking Layer, Atomic Force Microscopy (AFM), Nanoimprint Lithography, Symmetric AFM Probe |
| Abstract |
The reliable reproducibility of nano patterns or other nano structures is one of many issues
in the nano-imprint lithography process. An important prerequisite for reproducibility is suitable
adhesion properties of adhesion promoters or anti-sticking layer. In this study, rhombus shaped
symmetrical probe with a flat tip was developed and fabricated using MEMS fabrication technique.
For the experimental setup of the adhesion test using a UV curable PAK01 resin coated AFM tip with
several adhesion promoters, the flat tip is covered by PAK01 resist using micromanipulator.
Anti-sticking layers of silane agents were prepared on the tip by vapor deposition method. Adhesion
force between various adhesion promoters (GPTS, APMDS, APTS, DUV30J, O2 planairzation) and
PAK01 resist and the force between anti-sticking layer (FOTS, DDMS) and PAK01 resist were
evaluated using the force-distance mode of AFM. Adhesion force of GPTS and FOTS are about 7180
nN and 1660 nN, respectively. |
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