Paper Title:
Terrace Formation of SrTiO3 (111) Substrates for Epitaxial Thin Film Growth with Various Etching Conditions
  Abstract

The optimized terrace formation of SrTiO3 (111) substrates was investigated in various etching conditions. HCl-HNO3 solution was unstable for etching the SrTiO3 (111) substrates with different surface states. It was found that etching in buffered HF (BOE) solution for 2min provides a stable etching condition for SrTiO3 (111) substrates with various surface states and etching process is an important factor for the formation of step-terrace structures. The surface degradation of SrTiO3 (111) in normal atmosphere was also observed and it is considered that the humidity is a important factor for the surface degradation.

  Info
Periodical
Advanced Materials Research (Volumes 26-28)
Edited by
Young Won Chang, Nack J. Kim and Chong Soo Lee
Pages
1203-1206
DOI
10.4028/www.scientific.net/AMR.26-28.1203
Citation
J. H. Suh, Y. S. Lee, C. G. Park, "Terrace Formation of SrTiO3 (111) Substrates for Epitaxial Thin Film Growth with Various Etching Conditions", Advanced Materials Research, Vols. 26-28, pp. 1203-1206, 2007
Online since
October 2007
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