Paper Title:
Characteristics of SnOx-ZnO Composite Film on Poly Ethylene Terephalate (PET) Substrate Prepared by ECR-MOCVD
  Abstract

Zinc oxide and tin oxide (ZnSnOx) films on PET (Polyethylene Terephthalate) substrate were prepared by the electron cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) under an hydrogen, oxygen and argon atmosphere. The used tin and zinc precursor are TMT (tetramethyltin) and DEZn(diethylzinc), respectively. The metal (Zinc and Tin) oxidation content plays an important role to control the optical and electrical characteristics of the films. Therefore the optimum DEZn/TMT content can be determined by the counter stability effect between oxidation and zinc-tin deposition. The obtained ZnSnOx (or SnOx-ZnO) of high mobility films exhibited c.a. 7.0×10-3 ohm ·cm of electrical resistivity.

  Info
Periodical
Advanced Materials Research (Volumes 26-28)
Edited by
Young Won Chang, Nack J. Kim and Chong Soo Lee
Pages
515-518
DOI
10.4028/www.scientific.net/AMR.26-28.515
Citation
J. H. Park, D. J. Byun, J. K. Lee, "Characteristics of SnOx-ZnO Composite Film on Poly Ethylene Terephalate (PET) Substrate Prepared by ECR-MOCVD", Advanced Materials Research, Vols. 26-28, pp. 515-518, 2007
Online since
October 2007
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$32.00
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