Paper Title:
Investigation of Microholes Produced by Focused Ion Beam Micromachining
  Abstract

This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole’s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio.

  Info
Periodical
Advanced Materials Research (Volumes 264-265)
Edited by
M.S.J. Hashmi, S. Mridha and S. Naher
Pages
1346-1351
DOI
10.4028/www.scientific.net/AMR.264-265.1346
Citation
N. Hajar, M. Y. Ali, "Investigation of Microholes Produced by Focused Ion Beam Micromachining", Advanced Materials Research, Vols. 264-265, pp. 1346-1351, 2011
Online since
June 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Mohammad Yeakub Ali, Nurul Hajar
Abstract:This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the...
1352
Authors: Ji Ning Sun, Xi Chun Luo, Wen Long Chang, James M. Ritchie
Abstract:In this work, two kinds of freeform micro optics were successfully fabricated by using focused ion beam machining. A divergence compensation...
414
Authors: N. Atiqah, I.H. Jaafar, Mohammad Yeakub Ali, B. Asfana
Chapter 5: High Energy Beam Processing
Abstract:Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive,...
507
Authors: Fatin Syazana Jamaludin, Mohd Faizul Mohd Sabri
Abstract:The aspect ratio of microholes milled on silicon by FIB/SEM milling was investigated with various beam currents and initial depths of mill....
436
Authors: Chen Ying Wang, Shu Ming Yang, Qi Jing Lin, Zhuang De Jiang
Chapter 2: Sensors, Measurement and Detection
Abstract:The accuracy and traceability of measurement at nano-scale are directly related to nano-fabrication. Nanostep is typical structure, so the...
842