Paper Title:
Non-Standard FinFET Devices for Small Volume Sample Sensors
  Abstract

The presented work is focused on development of silicon wire-based MOS devices. .The original fabrication method has been described. Electrical performances of a variety of devices have been measured and evaluated. As these devices will be used as a platform for detectors of biochemical molecules, also tests of device operation oriented towards sensor applications have been done.

  Info
Periodical
Edited by
Alexei N. Nazarov and Jean-Pierre Raskin
Pages
127-135
DOI
10.4028/www.scientific.net/AMR.276.127
Citation
M. Zaborowski, D. Tomaszewski, L. Łukasiak, A. Jakubowski, "Non-Standard FinFET Devices for Small Volume Sample Sensors", Advanced Materials Research, Vol. 276, pp. 127-135, 2011
Online since
July 2011
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