Vacuum evaporation is usually utilized to remove volatile impurities in metallurgical grade silicon to prepare solar grade silicon by metallurgical routes. Especially phosphorus needs to be removed by vacuum evaporation. And the removal efficiency of impurities strongly influenced the quality and performance of products. In this paper, the removal efficiency of impurities is studied by using different raw material. The results indicated that the content of impurities in raw material had deep effect on the removal efficiency of vacuum evaporation. The high quality product can be obtained by vacuum evaporation only once from raw materials with the lower content of impurities whereas it is not for high content of impurities in raw material. This is due to the vapor-liquid equilibrium in the vacuum furnace. The impurities can be removed effectively by vacuum evaporation many times.