Paper Title:
Effects of Negative Bias Voltage on Structure and Mechanical Properties of DLC Films Synthesized by FCVA Deposition
  Abstract

Diamond-like carbon (DLC) films have been given great attention in the last twenty years and applied in many fields due to its super mechanical property. In this paper, DLC films were prepared by filter cathodic vacuum arc (FCVA) deposition under different negative bias voltage. No spalling was found in all of as-prepared DLC films. X-ray photoelectron spectroscopy (XPS), Raman spectra were employed to analyze composition and structure, the results showed that as-prepared DLC films had tendency of graphite with increase of negative bias voltage. Mechanical properties were characterized by micro-hardness and pin-on disc tests, the results showed that the hardness of DLC films decreased with bias voltage, but still kept good wear resistant.

  Info
Periodical
Advanced Materials Research (Volumes 287-290)
Chapter
Thin Films
Edited by
Jinglong Bu, Pengcheng Wang, Liqun Ai, Xiaoming Sang, Yungang Li
Pages
2203-2206
DOI
10.4028/www.scientific.net/AMR.287-290.2203
Citation
F. Wen, N. Huang, F.J. Jing, H. Sun, Y. Cao, "Effects of Negative Bias Voltage on Structure and Mechanical Properties of DLC Films Synthesized by FCVA Deposition", Advanced Materials Research, Vols. 287-290, pp. 2203-2206, 2011
Online since
July 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: J.G. Buijnsters, M. Camero, L. Vázquez, F. Agullo-Rueda, C. Gómez-Aleixandre, J.M. Albella
Abstract:In the present work, a-C:H films have been grown from argon/methane gas mixtures by Electron Cyclotron Resonance Chemical Vapour Deposition...
17
Authors: Feng Wen, Nan Huang, Yong Xiang Leng, Zhi Li, Yang Cao
Abstract:Diamond-Like carbon (DLC) films were prepared under different bias voltage by direct current magnetic filter cathode vacuum arc deposition...
2203
Authors: Yu Jiang Wang, Xin Xin Ma, Guang Ze Tang, Ming Ren Sun, Bin Shi Xu
Abstract:A series of a-C:H films have been prepared by plasma-based ion implantation (PBII) with acetylene on AISI 321 substrates. The effect of...
1279
Authors: X. Gui, Y. Y. Su, S. Y. Li, J. Mei, H. Sun, Yong Xiang Leng, N. Huang
Abstract:Hydrogenated amorphous carbon (a-C:H) films were deposited on aluminium alloy substrates by microwave electron cyclotron resonance chemical...
784
Authors: Long Lu, Guang Guang Feng
Chapter 13: Surface Engineering/Coatings
Abstract:40Cr steel substrate was coated with Ti0.33Al0.67N films by Multi-arc ion technology. Analyses of substrate negative...
1235