Paper Title:
Influence of Substrate Temperature on the Structural, Electrical and Optical Properties of Al-Doped ZnO Films by RF Magnetron Sputtering
  Abstract

Transparent conducting aluminum-doped zinc oxide (AZO) films have been prepared on soda-lime glass substrates by radio frequency magnetron sputtering using a high density ceramic target at different substrate temperatures. The structural, morphology, electrical, and optical properties of the AZO thin films were investigated by X-ray diffraction, scanning electron microscope, Hall measurement, and optical transmission spectroscopy, and which were strongly influenced by substrate temperatures. Films with better texture, higher transmission, lower resistivity and larger carrier concentration were obtained for the samples fabricated at higher substrate temperature. The AZO film with the lowest resistivity of 4.63×10−4 Ω.cm and an average optical transmission of 92% in the visible range was deposited on the substrate heated at 450 °C. The optical bandgap depends on the deposition condition, and was in the range of 3.35~3.59 eV.

  Info
Periodical
Advanced Materials Research (Volumes 287-290)
Chapter
Thin Films
Edited by
Jinglong Bu, Pengcheng Wang, Liqun Ai, Xiaoming Sang, Yungang Li
Pages
2308-2313
DOI
10.4028/www.scientific.net/AMR.287-290.2308
Citation
Y. H. Sun, C. H. Li, W. H. Xiong, C. H. Huang, "Influence of Substrate Temperature on the Structural, Electrical and Optical Properties of Al-Doped ZnO Films by RF Magnetron Sputtering", Advanced Materials Research, Vols. 287-290, pp. 2308-2313, 2011
Online since
July 2011
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$32.00
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