Paper Title:
Direct Writing Micro/Nano Structures on PZT Wafer by Laser Micromaching
  Abstract

The PZT is used for piezoelectric actuators that have high area efficiency but no good machinability. A direct writing micro structures on PZT wafer by excimer laser micromaching method has been proposed and confirmed. PZT nano-needle structures have also been fabricated by the direct writing method only by changing the laser micromachiong process parameters. The fabricated nano-needle structures can be very useful because of the need for studies on ferroelectric size effects as well as for potential applications such as ultra-high density memory devices.The relationship of process depth with the excimer laser parameters has been tested.

  Info
Periodical
Advanced Materials Research (Volumes 291-294)
Chapter
Laser Processing Technology
Edited by
Yungang Li, Pengcheng Wang, Liqun Ai, Xiaoming Sang and Jinglong Bu
Pages
1373-1376
DOI
10.4028/www.scientific.net/AMR.291-294.1373
Citation
Y. G. Li, J. Q. Liu, C. S. Yang, D. N. He, K. Tanaka, S. Sugiyama, "Direct Writing Micro/Nano Structures on PZT Wafer by Laser Micromaching", Advanced Materials Research, Vols. 291-294, pp. 1373-1376, 2011
Online since
July 2011
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Price
$35.00
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