Two kinds of magnetron sputtering ZrAlN films containing 23%atAl were deposited. The first was multicomponent ZrAlN film, the second was structure gradient and mulilayer film, named superlattice ZrAlN film. The microstructure was studied by FESEM, TEM , XRD, its mechanical properties were evaluated by nano-indentation method. The fracture toughness of films were determined from the length of ‘radial cracks’ on the applied diamond identer load 1.96N. the results show that, multicomponent ZrAlN film has hardness value of 35GPa, fracutre toughness value of 1.97MPa·m-0.5; while superlattice ZrAlN film has coresponding value of 40.1GPa and 3.17MPa·m-0.5. TEM image illustrates the superlattice ZrAlN film period is 2.5nm, nanoidentation test shows superlattice film has higher elastic recovery parameter and lower plastic work.