Paper Title:
Research on Output Power of Plasma for PCVD Synthesizing Silica Glass
  Abstract

Super purity silica glass was synthesized by Plasma Chemical Vapor Deposition (PCVD) method, during which inductively coupled plasma was used as the heat source. Influence of structure factor of tube and working gas on output power were discussed. The structure factor of tube was confirmed by analyzing the relation between structure factor of tube and coupling efficiency. With the increase of coupling efficiency, output power and plasma radius grow bigger. Super purity silica glass can be successfully synthesized when air was used working gas, during which input power was 100kW and output power reached to 40kW.

  Info
Periodical
Advanced Materials Research (Volumes 291-294)
Chapter
Advanced Manufacturing Technology
Edited by
Yungang Li, Pengcheng Wang, Liqun Ai, Xiaoming Sang and Jinglong Bu
Pages
3009-3012
DOI
10.4028/www.scientific.net/AMR.291-294.3009
Citation
Y. F. Wang, X. F. Song, Y. C. Sun, "Research on Output Power of Plasma for PCVD Synthesizing Silica Glass", Advanced Materials Research, Vols. 291-294, pp. 3009-3012, 2011
Online since
July 2011
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Price
$32.00
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