Paper Title:
Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology
  Abstract

This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.

  Info
Periodical
Advanced Materials Research (Volumes 291-294)
Chapter
NEMS/MEMS Technology and Devices
Edited by
Yungang Li, Pengcheng Wang, Liqun Ai, Xiaoming Sang and Jinglong Bu
Pages
3135-3138
DOI
10.4028/www.scientific.net/AMR.291-294.3135
Citation
P. C. Chi, W. P. Zhang, W. Y. Chen, H. Y. Li, K. Meng, "Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology", Advanced Materials Research, Vols. 291-294, pp. 3135-3138, 2011
Online since
July 2011
Export
Price
$32.00
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