A finite element model of an eddy current sensor array is built up by electromagnetic-circuit couple method, and the influences of crack length and frequency on sensor’s output characteristics are analyzed by this model. It is shown that the model established in this paper is reasonable. There would be a change on amplitude and phase when a crack appears below the footprint of sensing coil in metal plane, and the amplitude and phase of sensor coil are increasing gradually as crack propagation. As frequency increased, the differences between the sensing coils’ output become obvious. However, the differences begin decreasing while the frequency above 3MHz approximately. These results will provide a reference for further research and application of the sensor.