A computational model for position and posture error of 6-DOF parallel machines is proposed based on D-H transformation matrix and the inverse kinematics. The model is used to construct a linear least-square identification model for geometric parameter errors. Error identification program and compensation method are also presented. Simulation results indicate that the effects on position and posture of machines are almost equivalent from calculated least-square solution and from real values. The pose error of moving platform can be decreased up to 90% if error compensation is performed by modifying the input kinematic parameters of driving joints.