Paper Title:
Key Technologies in Image Processing of Interferogram
  Abstract

Interferogram processing is one of main techniques in optical interferometry metrology. Modern interferometry for thin-film thickness has the advantages of noncontact and high accuracy, etc. Interferogram processing is important Step of interferometry. This article is the sum-up about the key technology of interferogram processing in interferometry, it reduce key technology of interferogram processing to three steps: removing the noise, edge detection, region spreading and phase unwrapping. Interferogram processing can be realized by using software developed by the key technologies. Then getting surface of the measured material object, thus the measured material object is measured automatically. In this paper, the thin-film thickness is determined by the key technologies, setting the results of this method against results from ZYGO, the PV error and RMS maximum error are 0.0364λ and 0.002λ respectively. Although single interferogram was processed in this study, a phase distribution with high accuracy was achieved.

  Info
Periodical
Advanced Materials Research (Volumes 301-303)
Chapter
Chapter 3: Mechanical, Electronic and Material Engineering
Edited by
Riza Esa and Yanwen Wu
Pages
1719-1723
DOI
10.4028/www.scientific.net/AMR.301-303.1719
Citation
J. H. Su, W. B. Wan, L. H. Yang, J. Q. Xu, "Key Technologies in Image Processing of Interferogram", Advanced Materials Research, Vols. 301-303, pp. 1719-1723, 2011
Online since
July 2011
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Price
$32.00
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