Paper Title:
Research on Intelligentized Recognition Technology for Double Wavelength Laser Measurement of Thin Film Thickness
  Abstract

Interference image processing is the key technology of optical interference measurement. This paper introduced the problems on automatic interference fringe processing in absolutely measurement based on laser interference, digital image processing technology. The image acquisition of the SiO2 film and the pre-processing of interferogram was performed.Decimal part of the interference fringes is obtained. Using high-resolution image acquisition system and computer reads and processes the interference image, replaces the traditional work of skilled workers of high intensity for a long time and improves the film thickness measurement accuracy.

  Info
Periodical
Advanced Materials Research (Volumes 301-303)
Chapter
Chapter 3: Mechanical, Electronic and Material Engineering
Edited by
Riza Esa and Yanwen Wu
Pages
1760-1764
DOI
10.4028/www.scientific.net/AMR.301-303.1760
Citation
H. R. Li, J. H. Su, A. M. Ge, L. H. Yang, "Research on Intelligentized Recognition Technology for Double Wavelength Laser Measurement of Thin Film Thickness", Advanced Materials Research, Vols. 301-303, pp. 1760-1764, 2011
Online since
July 2011
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Price
$32.00
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