Paper Title:
Simulation to Compensate Ripple of Air Bearing Stage with Flexure Hinge Mechanisms
  Abstract

This letter suggests a method to improve tracking performance of an H-type XY stage with air bearings and flexure hinge mechanisms. The flexure hinge mechanisms are employed to prevent failure of the air bearings when the yaw motion error of the H-type stage is controlled using a control algorithm called gantry control. Adoption of the flexure hinge mechanism combined with the gantry control leads to occurrence of mutual ripple. Ripple should be handled to obtain good tracking performance. Modeling of the mutual ripple and simulation of two compensation algorithms are presented.

  Info
Periodical
Advanced Materials Research (Volumes 301-303)
Chapter
Chapter 3: Mechanical, Electronic and Material Engineering
Edited by
Riza Esa and Yanwen Wu
Pages
1795-1799
DOI
10.4028/www.scientific.net/AMR.301-303.1795
Citation
D. H. Ahn, D. G. Gweon, D. P. Hong, "Simulation to Compensate Ripple of Air Bearing Stage with Flexure Hinge Mechanisms", Advanced Materials Research, Vols. 301-303, pp. 1795-1799, 2011
Online since
July 2011
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Price
$32.00
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