Sol-Gel Fabrication of Low Temperature Organic-Inorganic Hybrid Film Patterns for Photonic Applications |
| Journal |
Advanced Materials Research (Volume 31) |
| Volume |
Semiconductor Photonics: Nano-Structured Materials and Devices |
| Edited by |
S. J. CHUA, J. H. TENG, O. WADA, R. DE LA RUE and X. H. TANG |
| Pages |
14-16 |
| DOI |
10.4028/www.scientific.net/AMR.31.14 |
| Online since |
November, 2007 |
| Authors |
Wen Xiu Que,
X.M. Ren,
W. Zhang,
W.J. Jiang,
Y. Gao,
X. Hu
|
| Keywords |
Organic-Inorganic Hybrid, Pattern, Photonic Applications, Sol-Gel Technology, Thin Film |
| Abstract |
Titania/organically modified silane hybrid thin films for photonic applications were
prepared by combining a low temperature sol-gel technique and a spin-coating process from an
organic-inorganic hybrid system. Effects of the titanium content and heat treatment temperature on
the structural and optical properties of the hybrid thin films were characterized by atomic force
microscopy and UV-visible spectroscopy. It is found that the optical and microstructural properties
of the hybrid thin films depend on the heat-treatment temperature and titanium molar contents. The
thickness and the refractive index of the hybrid thin films were also measured and found to be
related to the heat treatment temperature and titanium molar content. These results indicate that a
dense and high transparent hybrid thin film can be obtained at a low heat treatment temperature.
Potential photonic device structural patterns can easily fabricated from the as-prepared hybrid thin
films by using etching process. |
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