In this paper, a miniaturization nanoindentation and scratch device was developed. Finite element analysis was carried out to study static and modal characteristics of x/y flexure hinge and z axis driving hinge as well as effect of geometric parameters on output performances of z axis driving hinge. Results indicated that x/y flexure hinge and z axis driving hinge had enough strength and high natural frequencies. Geometric parameters of z axis driving hinge affected output performances significantly. The model of developed device was established. Indentation experiments of Si and amorphous alloy showed that the developed miniaturization nanoindentation and scratch device worked well and can carry out indentation experiments with certain accuracy.