Paper Title:
Experimental Research of Electrochemical Mechanical Polishing (ECMP) for Micro Tool Electrode
  Abstract

The mechanism of the elctrochemical mechanical polishing (ECMP) technology for micro tool electrode was investigated. In this paper, suitable major process parameters on the surface quality were evaluated, the major parameters contains electrical parameters, machining gap, the working fluid and other factors. In quantitative analyses, the process of the ECMP technology were conducted. The roughness of the workpiece was reduced from a relatively high value to a mirror effect.

  Info
Periodical
Advanced Materials Research (Volumes 314-316)
Chapter
Micro-Machining Technology
Edited by
Jian Gao
Pages
1846-1850
DOI
10.4028/www.scientific.net/AMR.314-316.1846
Citation
S. Guo, Z.N. Guo, H. P. Luo, W. C. Gu, "Experimental Research of Electrochemical Mechanical Polishing (ECMP) for Micro Tool Electrode", Advanced Materials Research, Vols. 314-316, pp. 1846-1850, 2011
Online since
August 2011
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Price
$32.00
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