Paper Title:
Study on a New Way of Aligning the Focal Plane for the Laser projection Image System
  Abstract

There has been many ways of finding out the focal plane of laser projection imaging system. However we use a new aligning way to get the optimum figure of the developed substrates through a microscope. In this paper, it is demonstrated that the range of depth of focus (DOF) changes together with the feature size in a way of positive correlation. This result can be used to figure out the shortest path to the focal plane. Thus a new way of aligning the focal plane for the LPI system is presented. We also test this system. It is found that the alignment precision is 2µm, adjustable range 2mm in the optical axis. Simultaneously the focal plane and the DOF can basically meet the demands in technical specification.

  Info
Periodical
Advanced Materials Research (Volumes 314-316)
Chapter
Laser Processing Technology
Edited by
Jian Gao
Pages
1914-1917
DOI
10.4028/www.scientific.net/AMR.314-316.1914
Citation
Y. Shi, J. Y. Zhou, L. Lei, Q. H. Lin, X. X. Wang, L. H. Mei, "Study on a New Way of Aligning the Focal Plane for the Laser projection Image System", Advanced Materials Research, Vols. 314-316, pp. 1914-1917, 2011
Online since
August 2011
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Price
$32.00
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