Paper Title:
Stiffness Calculation of the Microstructure with Crab-Leg Flexural Suspension
  Abstract

The stiffness of microstructure is an important parameter of the microsensor. It is usually obtained by FEM approach, which is difficult to give an analytical expression. This paper reports on a biaxial microaccelerometer with the crab-leg flexural suspension. Its stiffness is carried out by using force method and Castigliano’s theorem. During the deduction, we neither introduce the other assumptions nor design the special dimension. So this methodology is strict in theory, and can be extended to analysis for the displacement and stiffness of the symmetric and statically indeterminate microstructure.

  Info
Periodical
Advanced Materials Research (Volumes 317-319)
Chapter
Sensor Technology
Edited by
Xin Chen
Pages
1123-1126
DOI
10.4028/www.scientific.net/AMR.317-319.1123
Citation
Y. Liu, "Stiffness Calculation of the Microstructure with Crab-Leg Flexural Suspension", Advanced Materials Research, Vols. 317-319, pp. 1123-1126, 2011
Online since
August 2011
Authors
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Price
$32.00
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