Paper Title:
Coupled Electrostatic-Structures-Fluidic Analysis of a Nozzle/Diffuser Diaphragm Micropump
  Abstract

Micropump is the key component in the micro total analytical system. The major technical impediment in improving the performance of this micro-device lies in the lack of understanding the physical phenomena and their interactions of electric, mechanical, and fluidic fields for performing their intended functions. Because of the complexity of the micropump, the full coupled numerical analysis is extremely needed. This paper presents for the results of such fully coupled simulations. CFDRC® was used for the transient analysis of an electrostatically actuated micropump. The results show that the dynamic characteristics of fluid in the micropump and the vibration of flexible diaphragm are highly interactive each other. The flow rectification of the nozzle/diffuser will work only after the pressure difference between the two ends of valve have reached at a critical value. In the pump chamber, the fluidic press distribution almost independent of the space variation. Due to the increasing demands for accuracy, the nonlinear features of viscous loss of the fluid can no longer be neglected or simplified, but have to be taken into account in detail.

  Info
Periodical
Advanced Materials Research (Volumes 317-319)
Chapter
Advanced Forming Manufacturing and Equipment
Edited by
Xin Chen
Pages
1609-1613
DOI
10.4028/www.scientific.net/AMR.317-319.1609
Citation
J. X. Dong, X. Z. Lin, J. Ying, "Coupled Electrostatic-Structures-Fluidic Analysis of a Nozzle/Diffuser Diaphragm Micropump", Advanced Materials Research, Vols. 317-319, pp. 1609-1613, 2011
Online since
August 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Dan Jiang, Song Jing Li, Gang Bao
Abstract:In order to predict the dynamic characteristics, the piezoelectric valve-less diffuser micropump is equivalent to the hydraulic model which...
116
Authors: Hai Bin Pan, Jian Ning Ding, Guang Gui Cheng, Hui Juan Fan
Abstract:In this paper a twin-island structure in piezoresistive pressure sensor based on MEMS technology has been presented, and a finite element...
208
Authors: Tong Gang Liu, Jian Wu, Cong Xia, Zi Hang Qian
Chapter 12: Computer-Aided Design, Manufacturing and Engineering
Abstract:A novel ferrofluid-based microvalve adopting an electromagnetic actuation is presented. In the device, ferrofluid controlled by magnetic...
3767
Authors: Hai Feng Xie, Zhi Gang Yang, Meng Jie
Chapter 7: Industrial Equipment and Engineering
Abstract:To improve the driving ability of gas and light fluid which is sensitive to the temperature change, based on the system resonant principle a...
539
Authors: Wen Xiao Fang, Qin Wen Huang
Chapter 3: Product and Devices Design, Modelling, Simulation, Analisys and Manufacture
Abstract:This paper describes our recent work on the mechanical reliability of a commercial MEMS microphone by performing three mechanical tests, i.e....
551