Paper Title:
Effect of Structure on the Performance of Electrostatic MEMS Actuator
  Abstract

Four types of MEMS actuators are presented in this paper. The effect of structure on three major performance parameters of these actuators, such as resonance frequency, pull in voltage and stroke, are studied by FEA and compared with each other. The result shows that, on the condition of the same spring length and the same spring width , O-shape actuator have the largest stroke and pull in voltage, but that of L-shape actuator is the smallest.

  Info
Periodical
Advanced Materials Research (Volumes 317-319)
Chapter
NEMS/MEMS Technology and Equipment
Edited by
Xin Chen
Pages
1627-1630
DOI
10.4028/www.scientific.net/AMR.317-319.1627
Citation
F. R. Hu, M. E. Chen, J. Xiao, W. Yu, J. H. Niu, K. Nie, "Effect of Structure on the Performance of Electrostatic MEMS Actuator", Advanced Materials Research, Vols. 317-319, pp. 1627-1630, 2011
Online since
August 2011
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Price
$32.00
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