Paper Title:
Design of Proof Mass and System-Level Simulation of a Micromachined Electrostatically Suspended Accelerometer
  Abstract

A six-axis Micromachined Electrostatically Suspended Accelerometer (MESA) which is based on LIGA-type microfabrication was designed. MESA employs a levitated perforated plate as its proof mass. Three main purposes are considered for the design of the perforated proof mass: (1) reducing squeeze-film effect; (2) improving the dynamic response of MESA; (3) facilitating the etching of sacrificial layer under the plate. This paper utilized a finite element model for evaluating air squeeze film damping effect of perforated proof mass. Among several designs of perforated proof mass, the best choice was found. Besides, a system-level model created in CoventorWare is used to evaluate the effect of squeeze film damping and the dynamic response of the MESA.

  Info
Periodical
Advanced Materials Research (Volumes 317-319)
Chapter
NEMS/MEMS Technology and Equipment
Edited by
Xin Chen
Pages
1631-1634
DOI
10.4028/www.scientific.net/AMR.317-319.1631
Citation
Z. Wan, F. Cui, Y. K. Zhang, W. Liu, W. Y. Chen, W. P. Zhang, "Design of Proof Mass and System-Level Simulation of a Micromachined Electrostatically Suspended Accelerometer", Advanced Materials Research, Vols. 317-319, pp. 1631-1634, 2011
Online since
August 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Hyung Soo Ahn, Il Hyung Park, Denis DiAngelo
Abstract:The biomechanical changes brought on by spine fusion and the artificial disc designs to restore physiologic motion were studied by using a...
903
Authors: Shu Jie Zhang, Rui Wang, Chong Qi Ma
Chapter 5: Structure, Properties and Processes of Textile Materials
Abstract:The tubular textile composite material as the liner is inversed in the pipeline by gas or water pressure, and then the damaged pipeline can...
945
Authors: Hong Yuan Tang, Wei Lin
Chapter 1: Structural Engineering
Abstract:This paper uses ANSYS finite element program to do the nonlinear finite element analysis on steel reinforced concrete L-shaped short-shear...
571
Authors: Shan Suo Zheng, Yue Heng Yan, Qing Lin Tao, Wen Yong Li
Chapter 5: Seismic Engineering
Abstract:Based on the experiments of a reinforced concrete frame column, 5 new members with different volumetric percentage of stirrups which are...
2046
Authors: Cun Hui, Wan Lin Cao, Hong Ying Dong
Chapter 2: Structural Engineering
Abstract:The structural measures about puting the additional energy dissipation plat at the bottom of the CFST columns where bears more stress, was...
620