Paper Title:
High-Aspect-Ratio and Self-Sensing Probe for AMF Based on Micro-Fabrication
  Abstract

The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface aspect of the mechanical and optical devices. In this paper, a novel cantilever with a 50μm-length-probe and self-sensing piezoresistor was designed; and based on the micro fabrication technology, the processes were planned. The dynamic and static characteristics of the cantilever were analyzed on theory and finite element method (FEM). The results show that the length of the probe has no effect on the cantilever’s dynamic and static performance.

  Info
Periodical
Advanced Materials Research (Volumes 317-319)
Chapter
NEMS/MEMS Technology and Equipment
Edited by
Xin Chen
Pages
1645-1648
DOI
10.4028/www.scientific.net/AMR.317-319.1645
Citation
G. F. He, W. Gao, "High-Aspect-Ratio and Self-Sensing Probe for AMF Based on Micro-Fabrication", Advanced Materials Research, Vols. 317-319, pp. 1645-1648, 2011
Online since
August 2011
Authors
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Meng Kao Yeh, Bo Yi Chen, Nyan Hwa Tai, Chien Chao Chiu
Abstract:Atomic force microscopy (AFM) is widely used in many fields, because of its outstanding force measurement ability in nano scale. Some...
377
Authors: Ali Kafash Hoshiar, Mohamad Reza Khalili, Mahmood Hashemi Nejad, Hafez Raeisi Fard
Chapter 19: Nanofabrication, Nanometrology and Applications
Abstract:In this article a model to describe relation between AFM cantilever’s deformation and force (as a force transducer) is developed. Furthermore...
3688
Authors: Cheng Li, Wei Guo Huang, Lin Quan Yao
Chapter 2: Micro / Nano Materials
Abstract:The vibrational characteristics of cantilever beams with initial axial tension were studied using a nonlocal continuum Euler-Bernoulli beam...
760
Authors: Shuang Mei Li, Guan Min Li, Na Wang
Chapter 14: Design for Sustainability
Abstract:This article analyzes the static and dynamic characteristics of the mcrocantilever. Methods about how to improve the frequency resolution is...
2372
Authors: Takahiro Kawashima, Atsushi Matsui, Kazuo Muto, Moeto Nagai, Takayuki Shibata
Chapter 5: MEMS/NEMS
Abstract:In order to detect acoustic emission (AE) signals which are transient elastic waves generated by rapid release of strain energy derived from...
575