Paper Title:
A High–G Metal Capacitive Microaccelerometer with Round Proof Mass Supported by Multi-Beam
  Abstract

In this paper, differential capacitors sandwiched structure of a high-G capacitive microaccelerometer with round metal proof mass supported by multi-beam and its characteristic are presented. The operation principle and built-in self-calibration and self-test functions are described. The fabrication process and the fabricated chip of the microaccelerometer based on UV-LIGA technology are reported. The detection and closed-loop control circuits of the microaccelerometer are designed and calibrated. The range of the detection channel is ±6pF, the sensitivity is 89.3mV/pF, and the linearity is 2.59%.

  Info
Periodical
Advanced Materials Research (Volumes 317-319)
Chapter
Advanced NC Techniques and Equipment
Edited by
Xin Chen
Pages
1843-1846
DOI
10.4028/www.scientific.net/AMR.317-319.1843
Citation
Y. K. Zhang, F. Cui, Z. Wan, K. Li, W. Liu, W. P. Zhang, "A High–G Metal Capacitive Microaccelerometer with Round Proof Mass Supported by Multi-Beam", Advanced Materials Research, Vols. 317-319, pp. 1843-1846, 2011
Online since
August 2011
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Price
$32.00
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