Deposition and Properties Studies of Superfine TiN Films with Magnetic Filter |
| Journal |
Advanced Materials Research (Volume 32) |
| Volume |
Frontiers in Materials Science and Technology |
| Edited by |
John Bell, Cheng Yan, Lin Ye and Liangchi Zhang |
| Pages |
61-64 |
| DOI |
10.4028/www.scientific.net/AMR.32.61 |
| Online since |
February, 2008 |
| Authors |
Ling Chen,
De Chang Zeng,
Wan Qi Qiu,
Xin Wei Shi,
Zheng Yi Liu
|
| Keywords |
Adhesion, Arc Ion Plating, Hardness, Magnetic Filter, TiN Films |
| Abstract |
Arc ion plating(AIP) has higher deposition rates, whereas macro-particles (MPs) make
the film properties decreasing. In this paper, AIP with or without magnetic filter (MF or AIP) and
composition of AIP followed with magnetic filter (MFAIP) were designed to deposit TiN films on
silicon (Si) and high-speed steel(HSS), respectively. Scanning electron microscope (SEM),
nanoindentation and microscratch tests were investigated. SEM showed that both the MF and the
MFAIP films had a superfine layer among the columnar crystals grown vertically against substrate
surface. However, the columnar crystals of MF films were leptosomatic and well-orientational,
while MFAIP ones were coarse and short, and even ragged in size and orientation. Nanoindentation
test results showed the highest hardness for MF films and the lowest one for AIP films. A new
parameter Scratch Crack Propagation Resistance (CPRs) was introduced to evaluate the film
adhesion properties in a scratch test. MF films had the highest adhesion. AIP films were most
susceptible to failure as the CPRs was the lowest, although the Lc1 was higher than MFAIP ones. It
was proposed that the MPs were effectively removed with the MF, and the MF layers were
superfine to improve the properties of the films. |
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