Paper Title:
Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect
  Abstract

It is found that the phase position of p-component of reflected light changes with the metal film thickness, while the phase position of s-component almost doesn’t change in the Surface Plasmon Resonance effect. S-polarized light is taken as reference and interferometry is adopted to turn the change of the phase position into the change of interference fringes position in the paper, and the film thickness can be derived from it. The simulation results indicated that, through making use of piecewise quadratic fitting on the phase data, the inaccuracy with the range of film thickness is between 30 and 80 nanometers is not more than 0.33 nm.

  Info
Periodical
Chapter
Chapter 1: Key Engineering Materials
Edited by
Jun Hu and Qi Luo
Pages
377-381
DOI
10.4028/www.scientific.net/AMR.320.377
Citation
J. D. Xin, Q. G. Liu, C. Liu, T. T. Li, S. Y. Liu, "Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect", Advanced Materials Research, Vol. 320, pp. 377-381, 2011
Online since
August 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Dong Xu Zhang, Zhen Zhong Wang, Yin Biao Guo, Feng Yang, Ning Ning Zhang, Yan Ting Zhang, Hui Ye
Chapter 1: CAD/CAM
Abstract:Due to the range of the measuring system is limited in the measurement of large aspheric optical elements, test is hard to be once fulfilled,...
376
  | Authors: Wen Li Zhao, Yuan Ping Yin, Qian Fang
Chapter 4: Signal Processing
Abstract:Based on traditional theory of bistable stochastic resonance, this paper puts forward a piecewise stochastic resonance model which used to...
222