Configuration Synthesis of Micro/Nano-Positioning Stage Based on Graph Theory

The purpose of this paper was to generate several possible configurations of micro/nano-positioning stage with bridge-type mechanism based on graph theory. The structural characteristics of stage were discussed first. Then, these modules made up of micro/nano-positioning stage were abstracted. Thus the stage could be described with a tree-graph. According to the spanning tree theory, several possible configurations of stage are enumerated correspondingly. Subsequently, the configuration synthesis of six bridge-type mechanisms was investigated and 720 results were obtained. Rules for generating structures with symmetry are established. On the basis of this, several innovative structures are presented. Furthermore, the result of this paper provides a practicable approach for the structural design of stage and the design method based on graph theory is effective.