Paper Title:
Evaluation of Surface Roughness of Quartz Glass Substrate in Fabrication Process for Neutron Focusing Mirror
  Abstract

The aspherical supermirror is among the most useful optics for focusing a neutron beam with a wide wavelength range. The improvement in surface roughness is essential for increasing the focusing gain. A highly efficient and high-precision fabrication process for the substrate of the aspherical mirror combining conventional precision grinding, numerically controlled local wet etching (NC-LWE) figuring, and low-pressure polishing was developed. Using this new fabrication process, plano-elliptical neutron-focusing mirror substrates were successfully fabricated with a figure error of submicrometer order and an rms surface roughness of less than 0.3 nm. In this report, the surface roughness of a quartz glass substrate for a neutron focusing supermirror was evaluated.

  Info
Periodical
Chapter
Chapter 7: Machining of Silicon-Wafer and Glass
Edited by
Taghi Tawakoli
Pages
647-652
DOI
10.4028/www.scientific.net/AMR.325.647
Citation
M. Nagano, F. Yamaga, K. Yamasaki, N. Zettsu, D. Yamazaki, R. Maruyama, K. Soyama, K. Yamamura, "Evaluation of Surface Roughness of Quartz Glass Substrate in Fabrication Process for Neutron Focusing Mirror", Advanced Materials Research, Vol. 325, pp. 647-652, 2011
Online since
August 2011
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Price
$32.00
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