Nano-Topography Distribution on Non-Axisymmetric Aspherical Ground Surface

Both form accuracy and smooth surface is required in precision grinding. And the form accuracy and surface roughness are improved year by year. However, the more the surface roughness becomes smoother, the more the grinding marks become remarkable. The grinding mark deteriorates the accuracy of optical parts. It is found that the vibration of grinding wheel is transcribed to the ground surface and forms the waviness named nano-topography. And the nano-topography causes grinding marks. In this study, relationship between the nano-topography on non-axisymmetric aspherical ground surface and grinding condition is analyzed theoretically to control the distribution of nano-topography. As a result, simulation method of nano-topography distribution is developed.