Paper Title:
Nano-Topography Distribution on Non-Axisymmetric Aspherical Ground Surface
  Abstract

Both form accuracy and smooth surface is required in precision grinding. And the form accuracy and surface roughness are improved year by year. However, the more the surface roughness becomes smoother, the more the grinding marks become remarkable. The grinding mark deteriorates the accuracy of optical parts. It is found that the vibration of grinding wheel is transcribed to the ground surface and forms the waviness named nano-topography. And the nano-topography causes grinding marks. In this study, relationship between the nano-topography on non-axisymmetric aspherical ground surface and grinding condition is analyzed theoretically to control the distribution of nano-topography. As a result, simulation method of nano-topography distribution is developed.

  Info
Periodical
Chapter
Chapter 1: Grinding Technology
Edited by
Taghi Tawakoli
Pages
66-71
DOI
10.4028/www.scientific.net/AMR.325.66
Citation
N. Yoshihara, S. Fujimura, N. Nishikawa, M. Mizuno, T. Iyama, "Nano-Topography Distribution on Non-Axisymmetric Aspherical Ground Surface", Advanced Materials Research, Vol. 325, pp. 66-71, 2011
Online since
August 2011
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Price
$32.00
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