Most of the buildings for high-tech plants are fireproof and the process equipment in the clean room is in compliance with high-standard fire prevention evaluation regulations such as National Fire Prevention Association (NFPA), Factory Mutual (FM),and Semiconductor Equipment and Materials International (SEMI). However, fire management is usually neglected though fire protection higher than domestic fire control regulations is applied. Fireproof and smoke-proof design of the original buildings can be damaged due to expansion of production facilities, causing a potential danger of a fire. Cases of fires in domestic semiconductor manufacturing factories were explored in this research and claim settlements provided by MSIG Mingtai Insurance Co., Ltd., Taiwan to high-tech plants were analyzed for determination of the quantified weights used by the insurance companies when evaluating fire risks of a building. The fire safety badge promoted by Architecture and Building Research Institute, and Ministry of the Interior was also discussed for reference of fire safety assessments of high-tech factory buildings in the future.