Paper Title:
Probe-Type Microforce Sensor for Mirco/Nano Experimental Mechanics
  Abstract

In recent years with the development of MEMS and NEMS, various micro and nano scale experiments are required. In general, the smaller the sample, the smaller the force is in the measurement. But it is difficult to load and measure such small force. We developed a probe-type loading and force sensor system to measure micro/nano samples. The system employs a semiconductor strain gauge of a cantilever type sensor and a micro manipulator. A highly sensitive, stable sensing cantilever beam made of single crystal silicon is ion implanted to form the P-type resistor (strain sensor). A tungsten probe with 100 nm radius of curvature was attached to the end of the cantilever as the micro loading tip. We constructed the measurement system and investigated its properties, such as linearity, dynamic response and stability. We also employed microspeckle interferometry to calibrate the force sensor. In preliminary experiments, we successfully obtained the force resolution 0.7 μN and applied our probe-type microforce sensor to calibrate an atomic force microscope (AFM) probe beam and test a single silkworm filament.

  Info
Periodical
Advanced Materials Research (Volumes 33-37)
Edited by
Wei Yang, Mamtimin Geni, Tiejun Wang and Zhuo Zhuang
Pages
943-948
DOI
10.4028/www.scientific.net/AMR.33-37.943
Citation
X. D. Li, Z. Zhang, "Probe-Type Microforce Sensor for Mirco/Nano Experimental Mechanics", Advanced Materials Research, Vols. 33-37, pp. 943-948, 2008
Online since
March 2008
Authors
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Heng Liu, Feng Tian Zhang, Wei Su, Fu Tang Zhang
Abstract:The introduced resonant accelerometer makes use of the equivalent electrostatic stiffness to sense the acceleration. The sensitivity can be...
122
Authors: Jing Feng Wang, Bo Wang, Zhong Ming Zheng
Chapter 9: New Technology for the Preparation and Construction of Building Materials
Abstract:To research the mechanical behaviour of the novel composite beam with concrete filled steel tubular (CFST) truss, an experimental study of...
1680
Authors: Ying Zhang, Hong Wang, Yan Wang, Sheng Ping Mao, Gui Fu Ding
Chapter 1: Material Section
Abstract:This paper presents the design, fabrication and characterization of single beam for latching electrothermal microswitch. This microswitch...
286
Authors: Yun Liu, Yin Zhang
Chapter 3: Mechatronics and Robot Technology
Abstract:A variational method using the principle of virtual work (PVW) is presented to formulate the problem of the microcantilever stiction....
794
Authors: J.E. Darnbrough, S. Mahalingam, Peter E.J. Flewitt
Abstract:t is increasingly a requirement to be able to determine the mechanical properties of materials: (i) at the micro-scale, (ii) that are in the...
57