FGH95 superalloy cylindrical billet was prepared by spray forming, The yield is 73.6%, porosity is 0.6%, the oxygen content is only 20ppm. Spray forming preparation method and technological parameter were illustrated. The microstructure on the different positions of billet were observed. The results show that the difference of γ′ phase size, feature and distribution depend on different cooling velocity and local temperature difference during the spray forming process. SEM of nonmetallic inclusions were observed, and XPS of nonmetallic inclusions, nozzle and adhesive were analysed, the results show that the nonmetallic inclusions were from nozzle and adhesive.