Paper Title:
Preparation of Porous Alumina Abrasives with Different Morphologies and their Chemical Mechanical Polishing Behavior
  Abstract

The traditional solid alumina abrasive has been widely used in commercial slurries. But it is easy to cause polishing scratches due to its dense solid structure. The morphology of the abrasives can also impact on the chemical mechanical polishing (CMP) performances. To improve the CMP performances of the hard disk substrate, rods-like porous alumina and flower-like porous alumina abrasives were prepared and their chemical mechanical polishing behavior investigated. The results showed that the porous alumina abrasives with different morphologies exhibited lower topographical variations and surface roughness than solid alumina abrasives under the same testing conditions.

  Info
Periodical
Chapter
Chapter 3: Mechanical Dynamics and its Applications
Edited by
Xiaodong Zhang, Zhijiu Ai, Prasad Yarlagadda and Yun-Hae Kim
Pages
415-420
DOI
10.4028/www.scientific.net/AMR.338.415
Citation
X. Wu, H. Lei, R. L. Chen, "Preparation of Porous Alumina Abrasives with Different Morphologies and their Chemical Mechanical Polishing Behavior", Advanced Materials Research, Vol. 338, pp. 415-420, 2011
Online since
September 2011
Export
Price
$32.00
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