Paper Title:
Research of Sapphire Wafer Scribing by Using UV Laser
  Abstract

The Processing advantages of UV laser were discussed in this paper. A series of experiments were carried out, some good results was achieved, which proved UV laser is fit for sapphire wafer processing. Then how processing parameters affects machining quality was discussed, which provides guidance to machining practice. The formation of grooves with good surface quality can be achieved by selecting appropriate laser parameters.

  Info
Periodical
Chapter
Chapter 1: Advanced Design Technology
Edited by
Xiaodong Zhang, Zhijiu Ai, Prasad Yarlagadda and Yun-Hae Kim
Pages
90-93
DOI
10.4028/www.scientific.net/AMR.338.90
Citation
M. L. Wang, L. Qin, Y. Wang, M. Zhou, "Research of Sapphire Wafer Scribing by Using UV Laser", Advanced Materials Research, Vol. 338, pp. 90-93, 2011
Online since
September 2011
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Price
$35.00
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