Paper Title:
Optimal Design of a Cantilever-Based Sensor for Measuring Micro-Forces
  Abstract

In order to achieve the requirement of measuring forces during micromanipulation, a cantilever-based sensor using optical laser and position sensitive device (PSD) to monitor cantilever deflection is designed. To increase the resolution of the sensor at the specified measurement range, mechanical analysis and noise analysis are adopted to optimize parameters of the cantilever-based sensor. The experiment results show that the cantilever-based sensor can achieve the measurement range of 20mN and the resolution of 6.74μN.

  Info
Periodical
Advanced Materials Research (Volumes 341-342)
Edited by
Liu Guiping
Pages
873-877
DOI
10.4028/www.scientific.net/AMR.341-342.873
Citation
W. B. Rong, G. M. Huang, L. F. Wang, L. N. Sun, "Optimal Design of a Cantilever-Based Sensor for Measuring Micro-Forces", Advanced Materials Research, Vols. 341-342, pp. 873-877, 2012
Online since
September 2011
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