Ultra-precision mechanism lies in the core of ultra-precision electromechanical equipment, and is characterized by direct electromagnetic driving, air bearing supporting and ultra-precise vibration-isolation, putting a great challenge on design methodology and tools. This paper presents a model template design method which can provide effective computer aided design and engineering tools for new system design by encapsulating the design methods and design experience of ultra-precision mechanism into series of design templates. The model template contains toolkits both for forward structural design applied to new systems, and for the analysis and optimization of existing systems, as well as mathematical model and visualization tool in physical domain. The model templates are encapsulated and assembled according to the dynamical parameters and specific design parameters. Using planar electromagnetic drive structure in ultra-precision positioning system as an example, this paper discusses the design scheme of structure’s model template in detail, and introduces fast calculation method for magnetic field and visualization program, as well as forward design method for electromagnetic coil structure. Fast scheme design and analysis for ultra-precision mechanism can be achieved by using design templates.