Paper Title:
Precision Calculation Algorithm and Error Analysis of Zoom Magnification Measurement
  Abstract

The high precise measurement for magnification of optical system of microscope has been demonstrated by using special barcode design and precise barcode image processing technologies. The magnification measurement with 50ppm accuracy is obtained. According to the measurement error estimation, the accuracy for system magnification device is about 0.06%. Barcode position is possible to reach 0.5μm for low magnification and 0.1μm for high magnification.

  Info
Periodical
Chapter
Chapter 3: Advanced Test and Measurement
Edited by
Wensong Hu
Pages
828-834
DOI
10.4028/www.scientific.net/AMR.346.828
Citation
Z. D. Zeng, C. K. Sun, Y. Z. Zheng, M. D. Yan, S. K. Ng, "Precision Calculation Algorithm and Error Analysis of Zoom Magnification Measurement", Advanced Materials Research, Vol. 346, pp. 828-834, 2012
Online since
September 2011
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