Paper Title:
Analysis 2.5-D Permutation Power Transmission Line to Decrease Electro-Magnetic Influence at High Technology Nano-Fab
  Abstract

We present optimal permutation with 2.5-D power transmission lines system to reduce electro-magnetic influence at high technology nano-Fab. In this study, the magnetic field was lessened by mirror array power cable system, and simulation of results predicted the best permutations to decrease electromagnetic influence (EMI) value below 0.28 mG at working space without any shielding. Furthermore, this innovative method will cost down at high technology nano-Fab especially for 28 nanometer process.

  Info
Periodical
Advanced Materials Research (Volumes 356-360)
Chapter
Chapter 14: Environmental Protection
Edited by
Hexing Li, Qunjie Xu and Daquan Zhang
Pages
2711-2717
DOI
10.4028/www.scientific.net/AMR.356-360.2711
Citation
Y. L. Song, C. Yu, F. C. Chuang, Y. C. Tseng, J. Y. Zou, S. G. Shsu, T. G. Ma, T. L. Wu, L. M. Chang, "Analysis 2.5-D Permutation Power Transmission Line to Decrease Electro-Magnetic Influence at High Technology Nano-Fab", Advanced Materials Research, Vols. 356-360, pp. 2711-2717, 2012
Online since
October 2011
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Price
$32.00
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