Paper Title:
Electrostatic Control and New Device Handling Consideration for MEMS Manufacturing Process
  Abstract

Electrostatic potential and electrostatic discharge (ESD) has been a factory issue for years, not only limited to semiconductor-based electronic devices, but there are evidences that new devices from emerging technologies become sensitive which are MEMS and NEMS. This paper describes new electrostatic control and device handling solutions for critical electrostatic control environment for MEMS manufacturing processes. There are experiments of personnel grounding devices, device handling materials, and evaluation of static control surfaces.

  Info
Periodical
Advanced Materials Research (Volumes 378-379)
Chapter
Chapter 6: New Materials and Composites Materials
Edited by
Brendan Gan, Yu Gan and Y. Yu
Pages
659-662
DOI
10.4028/www.scientific.net/AMR.378-379.659
Citation
A. Chakkaew, W. Titiroongruang, "Electrostatic Control and New Device Handling Consideration for MEMS Manufacturing Process", Advanced Materials Research, Vols. 378-379, pp. 659-662, 2012
Online since
October 2011
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Price
$32.00
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