Paper Title:
Pseudo Transistor Matrix for Defect Density Extraction of Gate Oxide Shorts
  Abstract

Gate oxide shorts (GOS) defect is a critical factor in influencing yield or reliability of the wafer. Due to the conventional test vehicles are not appropriate to collect mass of testing data for GOS defect densities detection and have different manufacture process from the normal transistors resulting in the high testing cost. In this paper, a novel pseudo transistor matrix (PTM) is proposed for GOS density extraction which has almost the same structure as normal transistor. By assuming that GOS are completely independent, the defect density of GOS is extracted from the layout attributes and yield with PTM as a test vehicle to collect mass of testing data. Experimental results show that the extracted GOS defect density is in a good agreement with inline e-test data.

  Info
Periodical
Advanced Materials Research (Volumes 378-379)
Chapter
Chapter 6: New Materials and Composites Materials
Edited by
Brendan Gan, Yu Gan and Y. Yu
Pages
767-771
DOI
10.4028/www.scientific.net/AMR.378-379.767
Citation
Y. Ding, X. H. Luo, C. Gao, "Pseudo Transistor Matrix for Defect Density Extraction of Gate Oxide Shorts", Advanced Materials Research, Vols. 378-379, pp. 767-771, 2012
Online since
October 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Luciano Scaltrito, Edvige Celasco, Samuele Porro, Sergio Ferrero, Fabrizio Giorgis, C. Fabrizio Pirri, Denis Perrone, Umberto M. Meotto, P. Mandracci, G. Richieri, Luigi Merlin, Anna Cavallini, Antonio Castaldini, Marco Rossi
1081
Authors: Qing Gang Liu, Xin Qi Yu, Shi Ming Shen
Abstract:In this article, factors that influence the reliability of non damage testing is studied, and a method was developed to calculate the...
1300
Authors: Wen Yan Song, Xin Guo Ming, Zhen Yong Wu, Zhi Tao Xu, Li Na He
Chapter 1: Manufacturing Technology and Processing
Abstract:The development of new product with low cost and reliable quality is one of important means to improve customer satisfaction and increase...
241
Authors: Qian Ran Si, Guo Ying Yan, Hui Ying Zhang
Chapter 3: Materials and Information Technology
Abstract:In this paper we discuss the fundamental principle of defect analysis, introduce the basic framework of Orthogonal Defect...
488
Authors: Lin Liu, Qiang Wang, Kai Guo, Yan Xu, Shi Long Jia
Chapter 3: Measuring Technology and Mechatronics
Abstract:The quality criterion and engineering application of defects detection of complex joints of steel reinforced concrete (SRC) structure by...
1691