Paper Title:
Design of Coarse-Fine Combined Synchronization Control System for Lithography Based on Cross-Coupled Sliding Mode Control
  Abstract

In order to achieve high position precision and synchronization between the wafer stage and the reticle stage, a cross-coupled sliding mode control scheme for a coarse-fine combined synchronization servo system of lithography is proposed. To accomplish high bandwidth and high tracking precision, a conventional linear motor is combined with a voice coil motor as a coarse-fine dual-stage control system. A cross-coupled structure is presented to decrease the synchronization error during scanning operation. Sliding mode control law is designed based on the control error and the synchronization error. Simulation results show that the synchronization error and the control error have the same order of magnitude, and the dynamic performance of the control system satisfies the design requirement.

  Info
Periodical
Advanced Materials Research (Volumes 383-390)
Chapter
Chapter 8: Modeling, Analysis, and Simulation of Manufacturing Processes
Edited by
Wu Fan
Pages
2126-2131
DOI
10.4028/www.scientific.net/AMR.383-390.2126
Citation
Z. P. Wu, X. L. Chen, "Design of Coarse-Fine Combined Synchronization Control System for Lithography Based on Cross-Coupled Sliding Mode Control", Advanced Materials Research, Vols. 383-390, pp. 2126-2131, 2012
Online since
November 2011
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Price
$32.00
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