Paper Title:
Design and Analysis of a Piezoresistive Accelerometer with the Film-Island Structure
  Abstract

In this paper, we propose a piezoresistive accelerometer with the film- island structure, whose working range is up to 100,000g. Compared with the beam-island structure, the film-island structure has some advantages. With the film squeezed, the damping and the stiffness increase whereas the transverse sensitivity decreases. The fragmentation can be avoided in the overload situation. The damping characteristics, which are crucial for this accelerometer design, are theoretically analyzed in depth, and are verified by FEM simulation with ANSYS.

  Info
Periodical
Advanced Materials Research (Volumes 383-390)
Chapter
Chapter 8: Modeling, Analysis, and Simulation of Manufacturing Processes
Edited by
Wu Fan
Pages
2237-2241
DOI
10.4028/www.scientific.net/AMR.383-390.2237
Citation
X. M. Yang, W. Zhang, W. Zhao, "Design and Analysis of a Piezoresistive Accelerometer with the Film-Island Structure", Advanced Materials Research, Vols. 383-390, pp. 2237-2241, 2012
Online since
November 2011
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Price
$32.00
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