Paper Title:
Manufacturing of Multifunctional Nanocrystalline ZnO Thin Films
  Abstract

Optical, surface and structural properties of ZnO thin films fabricated by reactive radio- frequency (rf) magnetron sputtering and sol-gel coating methods are comparatively investigated. The optical properties of films produced by both techniques have very similar characteristics, however; the surface morphology and degree of crystallinity have different behaviors. The nanostructure columnar zinc oxide thin films can be synthesized by sol-gel coating methods which can have numerous applications requiring larger surface area. Also, the process scalability and large-scale manufacturing of these materials are discussed. It indicated that the nanostructure ZnO thin films can be synthesized with sol-gel methods at wafer levels with nano-grains and improved surface properties compared with reactive rf magnetron sputtering deposition.

  Info
Periodical
Advanced Materials Research (Volumes 383-390)
Chapter
Chapter 17: Manufacturing Process Planning and Scheduling
Edited by
Wu Fan
Pages
4073-4078
DOI
10.4028/www.scientific.net/AMR.383-390.4073
Citation
A. H. Jayatissa, A.M. Soleimanpour, Y. Hao, "Manufacturing of Multifunctional Nanocrystalline ZnO Thin Films", Advanced Materials Research, Vols. 383-390, pp. 4073-4078, 2012
Online since
November 2011
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Price
$32.00
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Chapter 3: Nanomaterials and Nanotechnology, Materials for Electronics
Abstract:Zinc Oxide (ZnO) is well known for its wide band gap semiconductor with large excitation energy that serves various application. These unique...
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