Paper Title:
Design of Control System Based on PLC for Polycrystalline Silicon Decomposition Furnace
  Abstract

It requires high security for useing silane decomposition reaction to produce the polycrystalline silicon. For this reason, the paper introduces the central facilities of the polycrystalline silicon production, and bases on production process, to devise a control system which combines PLC and industrial ethernet technology. The system controls temperature and pressure of the decomposition furnace, cooling water system, and production process. The practical result showes that the system is reliable and steady. It meets the requirements of process.

  Info
Periodical
Advanced Materials Research (Volumes 383-390)
Chapter
Chapter 22: Computer-Aided Engineering in Manufacturing
Edited by
Wu Fan
Pages
5576-5579
DOI
10.4028/www.scientific.net/AMR.383-390.5576
Citation
Q. Han, Y. L. Luo, "Design of Control System Based on PLC for Polycrystalline Silicon Decomposition Furnace", Advanced Materials Research, Vols. 383-390, pp. 5576-5579, 2012
Online since
November 2011
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Price
$32.00
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